SPPE-1000 Position Encoder Phase Modulated Analog Signal

The video demo above shows the analog outputs from SPPE-1000 heads before the phase demodulation process. The sinusoidal signal on top represents the MEMS oscillation signal, which is used as a reference signal for the phase demodulation. The two other signals below show a modulated signal from internal reference grating and the signal from the [...]

SPPE-1000 White Paper

This white paper discusses a new position encoder product (SPPE-1000), which integrates SPPE (scanning probe position encoder) technology developed by NanoWave Inc. and modulated laser interference encoder optics developed by Nikon Corporation. High frequency scan of laser beam on a moving scale creates harmonic signals which contain position information. Low-latency phase detection logic using PLL [...]